Design and Fabrication of Acoustic Wave Actuated Microgenerator for Portable Electronic Devices

The past few years have seen an increasing focus on energy harvesting issue, including power supply for portable electric devices. Utilize scavenging ambient energy from the environment could eliminate the need for batteries and increase portable device lifetimes indefinitely. In addition, through MEMS technology fabricated micro-generator could easy integrate with these small or portable devices. Several different ambient sources, including solar, vibration and temperature effect, have already exploited [1-3]. Each energy source should be used in suitable environment, therefore to produce maximum efficiency. In this paper, we present an acoustic wave actuated micro-generator for power system by using the energy of acoustic waves, such as the sound from human voices or speakerphone, to actuate a MEMS-type electromagnetic transducer. This provides a longer device lifetime and greater power system convenience. Moreover, it is convenient to integrate MEMS-based microgenerators with small or porta le devicesComment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

High Density out-of-Plane Microprobe Array

MEMS technology has been developed rapidly in the last few years. More and more special micro structures were discussed in several publications. However, all of the structures were produced by consist of the three fundamental structures, which included bridge, cantilever and membrane structures. Even the more complex structures were no exception. The cantilever with the property of simple design and easy fabrication among three kinds of fundamental structure, therefore, it was popular used in the design of MEMS device.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

DESIGN AND FABRICATION OF ACOUSTIC WAVE ACTUATED MICRO-GENERATOR

The past few years have seen an increasing focus on energy harvesting issue, including power supply for portable electric devices. Utilize scavenging ambient energy from the environment could eliminate the need for batteries and increase portable device lifetimes indefinitely. In addition, through MEMS technology fabricated micro-generator could easy integrate with these small or portable devices. Several different ambient sources, including solar, vibration and temperature effect, have already exploited [1-3]. Each energy source should be used in suitable environment, therefore to produce maximum efficiency. In this paper, we present an acoustic wave actuated micro-generator for power system by using the energy of acoustic waves, such as the sound from human voices or speakerphone, to actuate a MEMS-type electromagnetic transducer. This provides a longer device lifetime and greater power system convenience. Moreover, it is convenient to integrate MEMS-based microgenerators with small or porta le device